[图书][B] Зондовые нанотехнологии в электронике
В Неволин - 2022 - books.google.com
Прогресс в микроэлектронике связывают с уменьшением линейных размеров
функциональных элементов. Если их размеры становятся порядка нанометров, то …
функциональных элементов. Если их размеры становятся порядка нанометров, то …
Improving the performances of direct-current triboelectric nanogenerators with surface chemistry
Over the past decade, triboelectric nanogenerators (TENGs)–small and portable devices
designed to harvest electricity from mechanical vibrations and friction–have matured from a …
designed to harvest electricity from mechanical vibrations and friction–have matured from a …
Formation and disruption of conductive filaments in a HfO2/TiN structure
The process of the formation and disruption of nanometric conductive filaments in a HfO
2/TiN structure is investigated by conductive atomic force microscopy. The preforming state …
2/TiN structure is investigated by conductive atomic force microscopy. The preforming state …
Fabrication of submicron-scale devices by an atomic force microscope
By applying a negative voltage to the conducting tip of an atomic force microscope, we
modify on submicron-scale semiconducting oxygen deficient SrTiO 3− δ thin films grown on …
modify on submicron-scale semiconducting oxygen deficient SrTiO 3− δ thin films grown on …
Materials contrasts and nanolithography techniques in scanning force microscopy (SFM) and their application to polymers and polymer composites
Beyond measuring the topography of surfaces, scanning force microscopy (SFM) has
proved to be valuable both for mapping of various materials properties and for modifying …
proved to be valuable both for mapping of various materials properties and for modifying …
Low-energy electron exposure of ultrathin polymer films with scanning probe lithography
Scanning probe lithography (SPL) describes a group of patterning techniques, wherein
localized tip-sample interactions are utilized in order to directly or indirectly (via a resist film) …
localized tip-sample interactions are utilized in order to directly or indirectly (via a resist film) …
Conductive atomic force microscope nanopatterning of hydrogen-passivated silicon in inert organic solvents
CR Kinser, MJ Schmitz, MC Hersam - Nano letters, 2005 - ACS Publications
Ambient liquid phase atomic force microscope (AFM) techniques for nanopatterning organic
molecules on silicon through direct Si− C bonds rely on reactions that are in direct …
molecules on silicon through direct Si− C bonds rely on reactions that are in direct …
Modification and characterization of thin silicon gate oxides using conducting atomic force microscopy
S Kremmer, S Peissl, C Teichert, F Kuchar… - Materials Science and …, 2003 - Elsevier
Conducting atomic force microscopy (C-AFM) is used for the anodic oxidation on thermally
grown gate oxide samples. The electric field distribution during the oxidation process is …
grown gate oxide samples. The electric field distribution during the oxidation process is …
Nanofabrication using computer-assisted design and automated vector-scanning probe lithography
S Cruchon-Dupeyrat, S Porthun, GY Liu - Applied Surface Science, 2001 - Elsevier
This work represents our initial effort towards the fabrication of complex nanopatterns with
automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is …
automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is …
Scanned probe oxidation on an octadecyl-terminated silicon (111) surface with an atomic force microscope: kinetic investigations in line patterning
M Yang, Z Zheng, Y Liu, B Zhang - Nanotechnology, 2005 - iopscience.iop.org
Scanned probe oxidation (SPO) nanolithography has been performed with an atomic force
microscope (AFM) on an octadecyl-terminated silicon (111) surface to create protuberant …
microscope (AFM) on an octadecyl-terminated silicon (111) surface to create protuberant …