The paper reviews the state-of-the-art of miniaturized tunable lasers constructed by
microelectromechanical systems (MEMS) technology, covering various topics of laser …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

Micromirrors have recently emerged as an essential component in optical scanning
technology, attracting considerable attention from researchers. Their compact size and …

This paper presents a flexible printed circuit board (FPCB) actuator-driven micromirror
(referred to as FPCB micromirror hereafter)-based laser projection indicator. The device …

Compliant manipulators are advanced robotic systems articulated by the flexure joints to
deliver highly repeatable motion. Using the advantage of elastic deflection, these flexure …

We have developed a manufacturing process for micromirrors based on
microelectromechanical systems (MEMS) technology. The process involves designing an …

Представлен новый способ изготовления микроэлектромеханических устройств на
основе формирования изолированных блоков SiO 2 в пластине Si. Технология …

The present study has employed the phase-locked loop control method to ensure the
operating of MEMS actuators at their resonant frequency. In this study, the control algorism …

This paper reports the design and fabrication of a novel micromirror actuation system. The
actuating mechanism for driving the micromirror combines two paralleled bimorph actuators …