Development of hafnium based high-k materials—A review

JH Choi, Y Mao, JP Chang - Materials Science and Engineering: R: Reports, 2011 - Elsevier
The move to implement metal oxide based gate dielectrics in a metal-oxide-semiconductor
field effect transistor is considered one of the most dramatic advances in materials science …

High-k dielectrics for 4H-silicon carbide: present status and future perspectives

A Siddiqui, RY Khosa, M Usman - Journal of Materials Chemistry C, 2021 - pubs.rsc.org
Owing to its superior material and electrical properties such as wide bandgap and high
breakdown electric field, 4H-silicon carbide (4H-SiC) has shown promise in high power …

High‐mobility ZnO thin film transistors based on solution‐processed hafnium oxide gate dielectrics

M Esro, G Vourlias, C Somerton… - Advanced Functional …, 2015 - Wiley Online Library
The properties of metal oxides with high dielectric constant (k) are being extensively studied
for use as gate dielectric alternatives to silicon dioxide (SiO2). Despite their attractive …

Current conduction mechanisms in atomic-layer-deposited HfO2/nitrided SiO2 stacked gate on 4H silicon carbide

KY Cheong, JH Moon, HJ Kim, W Bahng… - Journal of Applied …, 2008 - pubs.aip.org
In this paper, current conduction mechanisms of an atomic-layer-deposited HfO 2 gate
stacked on different thicknesses of thermally nitrided SiO 2 based on n-type 4H SiC have …

Interface control and leakage current conduction mechanism in HfO2 film prepared by pulsed laser deposition

H Wang, Y Wang, J Zhang, C Ye, HB Wang… - Applied Physics …, 2008 - pubs.aip.org
The N 2 atmosphere postannealing is introduced to improve the interfacial quality and the
dielectric properties of HfO 2 films prepared by pulsed laser deposition. The disappearance …

Nano-composite MOx materials for NVMs

C Bonafos, L Khomenkhova, F Gourbilleau… - Metal Oxides for Non …, 2022 - Elsevier
In this chapter, we will present a digest of the main materials science aspects of the
controlled fabrication of 2D arrays of semiconducting (Si, Ge) nanocrystals (NCs) in metal …

Electronic excitation induced defect dynamics in HfO2 based MOS devices investigated by in-situ electrical measurements

N Manikanthababu, S Vajandar, N Arun… - Applied Physics …, 2018 - pubs.aip.org
In-situ IV and CV characterization studies were carried out to determine the device quality of
atomic layer deposited HfO 2 (2.7 nm)/SiO 2 (0.6 nm)/Si-based metal oxide semiconductor …

Improved Electronic Performance of Stacking Gate Dielectric on 4H SiC

KY Cheong, JH Moon, TJ Park, JH Kim… - … on Electron Devices, 2007 - ieeexplore.ieee.org
The MOS characteristics of an atomic layer-deposited HfO_2/N_2O-nitrided SiO_2 stacking
gate dielectric on n-type 4H SiC (0001) has been investigated. Three different thicknesses of …

Formation of Zr-oxynitride thin films on 4H-SiC substrate

YH Wong, KY Cheong - Thin Solid Films, 2012 - Elsevier
Formation of Zr-oxynitride by simultaneous oxidation and nitridation in nitrous oxide of
sputtered Zr on SiC substrate is reported. Sputtered Zr on SiC substrate and followed by …

Oxide or carbide nanoparticles synthesized by laser ablation of a bulk Hf target in liquids and their structural, optical, and dielectric properties

NG Semaltianos, JM Friedt, R Chassagnon… - Journal of Applied …, 2016 - pubs.aip.org
Laser ablation of a bulk Hf target in deionized (DI) water, ethanol, or toluene was carried out
for the production of nanoparticles' colloidal solutions. Due to the interaction of the ablation …