Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing

M Billet, T Vanackere, T Vandekerckhove… - Silicon Photonics …, 2024 - spiedigitallibrary.org
Photonic integrated circuits enable the miniaturization of photonic systems by integrating key
optical functions on a chip. While CMOS compatible silicon and silicon nitride are very …