MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

Laser interferometry is one of the most accurate measurement technologies whose
displacement resolution can reach the femtometer (fm) level. With the development of Micro …

An ultrahigh-speed phase demodulation system was designed for the Fabry–Perot (F–P)
interferometric sensor based on fiber array parallel spectral detection. A high-power …

This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer
that uses the principle of Fabry–Pérot (FP) interference in conjunction with a …

This paper introduces a nano-g level optical accelerometer based on a differential Fabry–
Pérot interferometer (DFPI) for low-frequency (less than 1 Hz) noise suppression. The …

Optical sensing techniques are well-known for electromagnetic immunity and thus have
been widely considered in high-performance vibration sensors such as accelerometers and …

High-sensitivity accelerometry has historically been employed to explore Earth sciences and
advance resource-related industries, such as petroleum exploitation. The devices capable of …

In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer
based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between …

Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting
stiffness properties. These mechanisms allow a wide range of positive and negative stiffness …

Traditional seismometers and gravimeters normally have large volumes and entail high
manufacturing costs. Aiming at the miniaturization of such geophysical instruments, a …