With the rapid commercialization of fifth generation (5G) technology in the world, the market
demand for radio frequency (RF) filters continues to grow. Acoustic wave technology has …

Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Many electronic systems depend on microelectromechanical system and
nanoelectromechanical system resonators for frequency control applications such as clock …

Over recent years, the surge in mobile communication has deepened global connectivity.
With escalating demands for faster data rates, the push for higher carrier frequencies …

This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Radio-frequency communication systems have long used bulk-and surface-acoustic-wave
devices supporting ultrasonic mechanical waves to manipulate and sense signals. These …

Radio frequency (RF) microelectromechanical systems (MEMS) based on Al1–x Sc x N are
replacing AlN-based devices because of their higher achievable bandwidths, suitable for the …

This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode
resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless …

With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …