DS Kwon, CH An, SH Kim, DG Kim, J Lim… - Journal of Materials …, 2020 - pubs.rsc.org
In this study, ruthenium (Ru) thin films were grown on Ta2O5, Si, Ru, and Pt substrates
(Ta2O5, Ru, and Pt are thin films, and Si is a bulk wafer) through atomic layer deposition …