We investigated the optical and the vibrational properties of amorphous SiO x N y: H thin
films deposited on silicon substrate using the plasma enhanced chemical vapor deposition …

In this paper, we employed a quadruple-layer antireflection coating structure with Al 2 O 3
deposited by DC reactive magnetron sputtering and SiO 2 deposited by PECVD (plasma …

PECVD deposited SiNx has been used in PV industry especially for PERC solar cell as anti-
reflection coating (ARC) and passivating layer [1]. However, its limited optical and electrical …

In this work, amorphous hydrogen-free silicon nitride (a-SiNx) and amorphous hydrogenated
silicon nitride (a-SiNx: H) films were deposited by radio frequency (RF) sputtering applying …

The present study reports the impact of process conditions and post annealing treatment on
the stress and physico-chemical properties in different types of plasma enhanced atomic …

As the Earth's population grows and nations become more developed the need for energy
continues to rise. The climate change brought about by warming temperatures from …

In this paper, a contribution to the classification of the various categories of amorphous
hydrogenated silicon oxynitride films using infrared spectroscopy has been carried out. A …

Köszönöm Dr. Serényi Miklósnak, hogy bevezetett az RF porlasztás rejtelmeibe, és hasznos
ötleteivel, tanácsaival folyamatosan segítette munkámat. Köszönettel tartozom Dr. Lovics …