A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

L Mazet, SM Yang, SV Kalinin… - … and technology of …, 2015 - iopscience.iop.org
SrTiO 3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the
route to the monolithic integration of various complex oxides on the complementary metal …

[图书][B] Chemical vapour deposition: precursors, processes and applications

AC Jones, ML Hitchman - 2009 - books.google.com
Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical
precursors in the vapour phase, and encompasses a variety of deposition techniques …

Nanoindentation investigation of HfO2 and Al2O3 films grown by atomic layer deposition

K Tapily, JE Jakes, DS Stone, P Shrestha… - Journal of The …, 2008 - iopscience.iop.org
The challenges of reducing gate leakage current and dielectric breakdown beyond the 45
nm technology node have shifted engineers' attention from the traditional and proven …

Epitaxial systems combining oxides and semiconductors

G Niu, G Saint-Girons, B Vilquin - Molecular Beam Epitaxy, 2018 - Elsevier
Oxides form a class of material, which covers almost all the spectra of functionalities:
dielectric, semiconductor, metallic, superconductor, optically nonlinear, piezoelectric …

Analog memristive devices based on La2NiO4+ δ as synapses for spiking neural networks

TK Khuu, A Koroleva, A Degreze… - Journal of Physics D …, 2023 - iopscience.iop.org
Neuromorphic computing has recently emerged as a potential alternative to the
conventional von Neumann computer paradigm, which is inherently limited due to its …

La2NiO4+δ‐Based Memristive Devices Integrated on Si‐Based Substrates

T Khuu, G Lefèvre, C Jiménez… - Advanced Materials …, 2022 - Wiley Online Library
Valence change memories, in which internal redox reactions control the change in
resistance are promising candidates for resistive random access memories (ReRAMs) and …

Integration of LaMnO3+ δ films on platinized silicon substrates for resistive switching applications by PI-MOCVD

R Rodriguez-Lamas, D Pla… - Beilstein Journal of …, 2019 - beilstein-journals.org
The next generation of electronic devices requires faster operation velocity, higher storage
capacity and reduction of the power consumption. In this context, resistive switching memory …

Direct-liquid-evaporation chemical vapor deposition of smooth, highly conformal cobalt and cobalt nitride thin films

J Yang, K Li, J Feng, RG Gordon - Journal of Materials Chemistry C, 2015 - pubs.rsc.org
By a direct-liquid-evaporation chemical vapor deposition (DLE-CVD) method, we deposited
smooth low-resistance cobalt (Co) and cobalt nitride (CoxN) thin films with excellent …

CVD of metals using alcohols and metal acetylacetonates, Part I: Optimization of process parameters and electrical characterization of synthesized films

PA Premkumar, N Bahlawane… - Chemical Vapor …, 2007 - Wiley Online Library
A new successful strategy is developed for the production of Ni, Cu, and Co films using
commercially available metal acetylacetonates as precursors. Pulsed spray evaporation …

Addition of yttrium into HfO2 films: Microstructure and electrical properties

C Dubourdieu, E Rauwel, H Roussel… - Journal of Vacuum …, 2009 - pubs.aip.org
The cubic phase of Hf O 2 was stabilized by addition of yttrium in thin films grown on Si∕ Si
O 2 by metal-organic chemical vapor deposition. The cubic phase was obtained for contents …