MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications:
among others, the use of MEMS accelerometers for seismology related applications has …

This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

Precise measurement of variations in the local gravitational acceleration is valuable for
natural hazard forecasting, prospecting, and geophysical studies. Common issues of the …

The recent development of Micro-Electro-Mechanical System (MEMS) technology has
provided new methods for researchers to design and fabricate seismometers and …

This paper introduces a fiber-optic microelectromechanical system (MEMS) seismic-grade
accelerometer that is fabricated by bulk silicon processing using photoresist/silicon dioxide …

Seismology was developed on Earth and shaped our model of the Earth's interior over the
twentieth century. With the exception of the Philae lander, all in situ extraterrestrial …

Seismic data will be a vital geophysical constraint on internal structure of Europa if we land
instruments on the surface. Quantifying expected seismic activity on Europa both in terms of …

High precision accelerometers play a vital role in the measurement of the Earth's
gravitational field. They can be used in the rotating-accelerometer-based gravity gradient …

This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based
spring-mass sensing element. The displacement changes of the proof mass are sensed by …