The discrete control of ion energy and flux is of increasing importance to industrially relevant
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …

A two-dimensional self-consistent fluid model was developed to investigate the ignition of
radio frequency (RF) discharge in an atmospheric helium cascade glow discharge. In …

The development of real-time control strategies for key discharge parameters, such as
densities, fluxes, and energy distributions, is of fundamental interest to many plasma …

The development of compact, low power, charge–neutral propulsion sources is of significant
recent interest due to the rising application of micro-scale satellite platforms. Among such …

Ion energy distribution functions (IEDFs) incident upon material surfaces in radio frequency
(rf) capacitively coupled plasmas are coupled to spatial and temporal sheath dynamics …

This thesis demonstrates the capability to control the particle heating mechanisms in radio-
frequency (rf) hollow cathode electrothermal micropropulsion sources via the application of …

Plasma processing of semiconductors allows high-precision etching of nanoscale-sized
features and as a result the computational power of devices has continued to increase …