Antimony doped tin oxide MOS sensors for hydrogen detection at low concentrations

C Sneha, VK Baiju, S Varghese - Sensors and Actuators A: Physical, 2023 - Elsevier
Abstract In this study, Antimony (Sb) doped tin oxide (SnO 2) thin films (ATO) were
synthesized using the RF (radio frequency) sputtering technique with varying antimony …

Effect of substrate temperature on the characteristics of ZnO films produced by a combination of thermal vapor deposition and oxidation processes

C Sneha, C Prabukumar, M Jayalakshmi… - Journal of Materials …, 2017 - Springer
In the present work, ZnO semiconductor films were prepared by following two step
processes, namely, thermal vapor deposition of the zinc on the glass substrate followed by …