Beyond biology: alternative uses of cantilever-based technologies

H Muñoz-Galán, C Alemán, MM Pérez-Madrigal - Lab on a Chip, 2023 - pubs.rsc.org
Micromechanical cantilever sensors are attracting a lot of attention because of the need for
characterizing, detecting, and monitoring chemical and physical properties, as well as …

A review on surface stress-based miniaturized piezoresistive SU-8 polymeric cantilever sensors

R Mathew, A Ravi Sankar - Nano-micro letters, 2018 - Springer
In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …

Semiconductor piezoresistance for microsystems

AA Barlian, WT Park, JR Mallon… - Proceedings of the …, 2009 - ieeexplore.ieee.org
Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Lateral buckling mechanics in silicon nanowires on elastomeric substrates

SY Ryu, J Xiao, WI Park, KS Son, YY Huang, U Paik… - Nano …, 2009 - ACS Publications
We describe experimental and theoretical studies of the buckling mechanics in silicon
nanowires (SiNWs) on elastomeric substrates. The system involves randomly oriented …

Metallic nanowires by full wafer stencil lithography

O Vazquez-Mena, G Villanueva, V Savu, K Sidler… - Nano …, 2008 - ACS Publications
Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing
nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires …

Suspended micro/nano channel resonators: a review

A De Pastina, LG Villanueva - Journal of Micromechanics and …, 2020 - iopscience.iop.org
Micro-and nano-electromechanical systems (M/NEMS) have demonstrated outstanding
sensing capabilities down to the yoctogram () scale in vacuum environment and cryogenic …

[HTML][HTML] Design optimization of piezoresistive cantilevers for force sensing in air and water

JC Doll, SJ Park, BL Pruitt - Journal of applied physics, 2009 - pubs.aip.org
Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for
force, topography, and chemical sensing at the micro-and macroscales. Proper design is …

Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors

MZ Ansari, C Cho - Sensors, 2009 - mdpi.com
This study presents the deflection, resonant frequency and stress results of rectangular,
triangular, and step profile microcantilevers subject to surface stress. These cantilevers can …

Review of scanning probe micromachining and its applications within nanoscience

T Michels, IW Rangelow - Microelectronic Engineering, 2014 - Elsevier
Current progress on micro/nanofabrication of dynamic mode cantilever sensors utilized as
scanning probes, and their diverse sensing applications within physics, chemistry, and …

Piezoresistive cantilevers for nanomechanical sensing

J Bausells - Microelectronic Engineering, 2015 - Elsevier
Microfabricated cantilevers have enabled a wide range of applications in scanning probe
microscopies (SPM) and in high-sensitivity nanomechanical sensors. The use of …