The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

This paper reviews deposition, integration, and device fabrication of ferroelectric PbZr x Ti 1-
x O 3 (PZT) films for applications in microelectromechanical systems. As examples, a …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

In this article, domain wall motion and the extrinsic contributions to the dielectric and
piezoelectric responses in sol–gel derived lead zirconate titanate PZT films with …

Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …

Electroceramics research is driven by technology and device applications. This growing field
includes a vast number of magnetic, dielectric, ionically conducting, semiconducting, and …

This paper describes fabrication arid characterization results of piezoelectric micromachined
ultrasonic transducers (pMUTs) based on 2-/spl mu/m-thick Pb (Zr/sub 0.53/Ti/sub …

This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-
x/O/sub 3/(PZT) films for applications in micro-electromechanical systems. An ultrasonic …

Pb (Zrx, Ti1− x) O3 (PZT) piezoelectric thin films are of major interest in MEMS technology for
their ability to provide electro-mechanical coupling. In this work, the effective transverse …