MEMS sensors for diagnostics and treatment in the fight against COVID-19 and other pandemics
As the world is going through an existential global health crisis, ie, the outbreak of novel
coronavirus-caused respiratory disease (Covid-19), the healthcare systems of all the …
coronavirus-caused respiratory disease (Covid-19), the healthcare systems of all the …
Analytical modeling and numerical investigation of a variable width piezoresistive multilayer polymer micro-cantilever air flow sensor
PV Kasambe, K S. Bhole, AA Bage… - Advances in Materials …, 2022 - Taylor & Francis
Measurement of air flow is a vital concern in diverse domains. Piezoresistive micro-
cantilever-based air flow sensing is a promising research domain within MEMS technology …
cantilever-based air flow sensing is a promising research domain within MEMS technology …
MEMS flow sensor using suspended graphene diaphragm with microhole arrays
This letter reports a miniature flow sensor using a suspended composite membrane of
graphene and silicon nitride containing an array of microscale through-holes. As a fluid flow …
graphene and silicon nitride containing an array of microscale through-holes. As a fluid flow …
Effect of Stiffness in Sensitivity Enhancement of MEMS Force Sensor Using Rectangular Spade Cantilever for Micromanipulation Applications
MEMS force sensor has undergone a significant change in revenue collection in the past
5years. Due to continuous development in microsystem technologies, the need for smart …
5years. Due to continuous development in microsystem technologies, the need for smart …
Design and optimization of resonant cavity piezoelectric cantilever sensor for wind velocity and direction measurement
J Hu, L Wang, S Chen - IEEE Transactions on Instrumentation …, 2022 - ieeexplore.ieee.org
In this article, a resonant cavity piezoelectric cantilever sensor (RCPCS) is designed and
optimized for wind velocity and direction measurement. The RCPCS consists of a resonant …
optimized for wind velocity and direction measurement. The RCPCS consists of a resonant …
Influence of surface layer properties on the thermo-electro-mechanical characteristics of a MEMS/NEMS piezoresistive cantilever surface stress sensor
In the past decade, micro/nano cantilever platforms have been actively explored for realizing
variety of MEMS/NEMS sensor and actuator systems. In treatise, a majority of the cantilever …
variety of MEMS/NEMS sensor and actuator systems. In treatise, a majority of the cantilever …
An approach to design a wireless air flow transmitter using flex sensor
In process industries, air flow rate measurement and transmission are usually performed by
various passive conventional sensors. Here, air flow rate for moderate flow applications is …
various passive conventional sensors. Here, air flow rate for moderate flow applications is …
Design of an array of piezoresistive airflow sensors based on pressure loading mode for simultaneous detection of airflow velocity and direction
As an irreplaceable element for obtaining airflow information in many engineering
scenarios, airflow sensors have gained increasing attention across the fields of aerospace …
scenarios, airflow sensors have gained increasing attention across the fields of aerospace …
A measuring method for micro force based on MEMS planar torsional spring
J Wu, T Liu, K Wang, K Sørby - Measurement Science and …, 2020 - iopscience.iop.org
In order to measure the micro force in a micro-nano device, a new measuring method for
micro force is introduced. In this paper, a measuring system based on a micro-electro …
micro force is introduced. In this paper, a measuring system based on a micro-electro …
Sensitivity and reliability enhancement of a MEMS based wind speed sensor
This paper describes shape modification of microcantilever to enhance the sensitivity and
reliability of a MEMS based wind speed sensor. Finite element analysis simulations with …
reliability of a MEMS based wind speed sensor. Finite element analysis simulations with …