Stencil lithography for scalable micro-and nanomanufacturing

K Du, J Ding, Y Liu, I Wathuthanthri, CH Choi - Micromachines, 2017 - mdpi.com
In this paper, we review the current development of stencil lithography for scalable micro-
and nanomanufacturing as a resistless and reusable patterning technique. We first introduce …

Polycrystalline diamond micro‐hotplates

ELH Thomas, J Stritt, S Mandal, M Imboden… - Small, 2023 - Wiley Online Library
Micro‐hotplate structures are increasingly being investigated for use in a host of applications
ranging from broadband infra‐red sources within absorption‐based gas sensors to in situ …

Beyond Solution‐Based Printing: Unveiling Innovations and Advancements in Solvent‐Free Printing Technologies

VVK Doddapaneni, C Song, JA Dhas… - Advanced Functional …, 2025 - Wiley Online Library
Vapor printing technologies are emerging as powerful tools for device fabrication due to
their unique solvent‐free nature. In recent years, a few articles have been published to …

A system for probing Casimir energy corrections to the condensation energy

D Pérez-Morelo, A Stange, RW Lally… - Microsystems & …, 2020 - nature.com
In this article, we present a nanoelectromechanical system (NEMS) designed to detect
changes in the Casimir energy. The Casimir effect is a result of the appearance of quantum …

Cryogenic fab-on-a-chip sticks the landing

M Imboden, H Han, T Stark, D Bishop - ACS nano, 2017 - ACS Publications
Using a microelectromechanical systems (MEMS)-based Fab-on-a-Chip, we quench-
condense lead thin-films. Suppressing the formation of lead islands makes it possible to …

A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures

R Lally, M Imboden, A Stange, LK Barrett… - Journal of …, 2022 - ieeexplore.ieee.org
Cryogenically produced thin film structures at the research scale facilitate many novels
experiments. This paper discusses the construction of a fully integrated, MEMS based …

A chip-scale, low cost PVD system

LK Barrett, RW Lally, NE Fuhr… - Journal of …, 2020 - ieeexplore.ieee.org
Standard physical vapor deposition systems are large, expensive, and slow. As part of an on-
going effort to build a fab-on-a-chip, we have developed a chip-scale, low cost, fast physical …

The Construction of a Fully Integrated, MEMS Based, Atomic-Scale 3D Printer

R Lally, M Imboden, A Stange, L Barrett… - engrxiv.org
We describe the construction of a fully integrated, MEMS based, 3D printer, capable of
printing atomic-scale features. In this mm-scale device, we have built a complete nanofab for …

[PDF][PDF] A System for Probing Casimir Energy Corrections to the Condensation Energy

AS Imboden, DK Campbell, VA Aksyuk… - Institute for Research in … - tsapps.nist.gov
50 In this article, we present a nanoelectromechanical system (NEMS) designed to detect 51
changes in the Casimir energy. The Casimir effect is a result of the appearance of quantum …

Casimir cavity physics with MEMS: force measurements and detecting the Casimir energy

AC Stange - 2020 - search.proquest.com
Abstract The Casimir Effect is a physical manifestation of quantum fluctuations of the
electromagnetic vacuum. When two metal plates are placed closely together, typically much …