Method of fabricating a charge-trapping gate stack using a CMOS process flow

K Ramkumar, HMM Shih - US Patent 8,993,457, 2015 - Google Patents
BACKGROUND While Integrated circuits including logic devices and inter face circuits
based upon metal-oxide-semiconductor field effect transistors (MOSFETs) are typically …

Vertical and 3D memory devices and methods of manufacturing the same

SP Hong - US Patent 9,589,979, 2017 - Google Patents
A memory device is described, which includes a block of memory cells comprising a plurality
of stacks of horizontal active lines such as NAND string channel lines, with a plurality of …

Vertical-type non-volatile memory devices having dummy channel holes

CH Lee - US Patent 9,406,692, 2016 - Google Patents
A vertical-type nonvolatile memory device is provided in which differences between the
sizes of channel holes in which channel structures are formed are reduced. The vertical-type …

Semiconductor devices including stair step structures, and related methods

A Yip, Q Tang, CW Ha - US Patent 9,165,937, 2015 - Google Patents
Semiconductor devices, such as three-dimensional memory devices, include a memory
array including a stack of conductive tiers and a stair step structure. The stair step structure is …

Semiconductor memory

M Tagami, J Iijima, R Katsumata, K Higashi - US Patent 10,381,374, 2019 - Google Patents
According to one embodiment, a semiconductor memory device includes a first memory
chip, a circuit chip, and an external connection electrode on a surface of the first memory …

Fabricating 3D NAND memory having monolithic crystalline silicon vertical NAND channel

P Rabkin, J Pachamuthu, J Alsmeier… - US Patent …, 2016 - Google Patents
Disclosed herein are techniques for fabricating 3D NAND memory devices having a mono-
crystalline silicon semicon ductor vertical NAND channel. Memory holes are formed in …

Nonvolatile memory device and a method for fabricating the same

YH Son, J Kim, C Kang, Y Park, JD Lee, K Kim… - US Patent …, 2018 - Google Patents
A nonvolatile memory device includes a conductive line disposed on a substrate and
vertically extended from the substrate, a first channel layer disposed on the substrate and …

Semiconductor memory device and method for manufacturing same

T Kamigaichi - US Patent 9,917,096, 2018 - Google Patents
According to one embodiment, a semiconductor memory device includes a stacked body
including a plurality of electrode layers and a plurality of inter-layer insulating layers each …

NVM memory HKMG integration technology

WC Wu, CH Chang - US Patent 10,276,587, 2019 - Google Patents
The present disclosure relates to a method of forming an integrated circuit (IC). In some
embodiments, a substrate is provided comprising a memory region and a logic region. A …

Integrated circuit self aligned 3D memory array and manufacturing method

HT Lue - US Patent 8,780,602, 2014 - Google Patents
May 29, 2012, now Pat. No. 8,467,219, which is a continuation of application No.
12/692.798, filed on A 3D memory device includes a plurality of ridge-shaped Jan. 25, 2010 …