Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Low-voltage high-reliability MEMS switch for millimeter wave 5G applications

S Shekhar, KJ Vinoy… - … of Micromechanics and …, 2018 - iopscience.iop.org
Lack of reliability of radio-frequency microelectromechanical systems (RF MEMS) switches
has inhibited their commercial success. Dielectric stiction/breakdown and mechanical shock …

Challenges and developments of self-assembled monolayers and polymer brushes as a green lubrication solution for tribological applications

S Watson, M Nie, L Wang, K Stokes - RSC advances, 2015 - pubs.rsc.org
Self-assembled monolayers (SAMs), after originally being investigated due to their functions
in changing surface wettability, have been significantly developed over the years. Many …

Contact time dependence of adhesion force at silica/silica interface on AFM: Influence of relative humidity and contact history

T Lai, M Chen, Y Zhang - Applied Surface Science, 2022 - Elsevier
In the micro-nano adhesion force study, discrepancies in contact time dependence require
clarification. Adhesion forces between hydrophobic silica cantilevers and partially …

Contact time dependence of adhesion force studied at low, moderate, and high relative humidities on AFM: Influence of surface hydrophilicity

T Lai, Y Zhang, T Zhu - Applied Surface Science, 2024 - Elsevier
Contact time dependence of adhesion force remains insufficiently comprehended and
demands further clarification. Adhesion forces between cantilevers and various substrates …

Different evolution behaviors of adhesion force with relative humidity at silica/silica and silica/graphene interfaces studied using atomic force microscopy

T Lai, T Zhu, Y Chen, M Guo - Langmuir, 2021 - ACS Publications
The influence of relative humidity (RH) on adhesion forces demands clarification. Adhesion
forces at silica/silica and silica/graphene interfaces were measured on an atomic force …

Laser-based micro/nanofabrication in one, two and three dimensions

W Xiong, Y Zhou, W Hou, L Jiang… - Frontiers of …, 2015 - Springer
Advanced micro/nanofabrication of functional materials and structures with various
dimensions represents a key research topic in modern nanoscience and technology and …

Sublimation technique for minimization of stiction induced during fabrication of closely spaced microstructures

K S. Bhole, B Kale - Advances in Materials and Processing …, 2022 - Taylor & Francis
Stiction effect during post-processing of the polymer-based microelectro mechanical
systems (MEMS) is a major class of failure in which two arrayed microstructures adhere …

Migration of adhesive material in electrostatically actuated MEMS switch

IV Uvarov - Microelectronics Reliability, 2021 - Elsevier
Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …