WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
This paper presents a comprehensive review of the reliability issues hampering capacitive RF MEMS switches in their development toward commercialization. Dielectric charging and …
S Shekhar, KJ Vinoy… - … of Micromechanics and …, 2018 - iopscience.iop.org
Lack of reliability of radio-frequency microelectromechanical systems (RF MEMS) switches has inhibited their commercial success. Dielectric stiction/breakdown and mechanical shock …
S Watson, M Nie, L Wang, K Stokes - RSC advances, 2015 - pubs.rsc.org
Self-assembled monolayers (SAMs), after originally being investigated due to their functions in changing surface wettability, have been significantly developed over the years. Many …
T Lai, M Chen, Y Zhang - Applied Surface Science, 2022 - Elsevier
In the micro-nano adhesion force study, discrepancies in contact time dependence require clarification. Adhesion forces between hydrophobic silica cantilevers and partially …
T Lai, Y Zhang, T Zhu - Applied Surface Science, 2024 - Elsevier
Contact time dependence of adhesion force remains insufficiently comprehended and demands further clarification. Adhesion forces between cantilevers and various substrates …
T Lai, T Zhu, Y Chen, M Guo - Langmuir, 2021 - ACS Publications
The influence of relative humidity (RH) on adhesion forces demands clarification. Adhesion forces at silica/silica and silica/graphene interfaces were measured on an atomic force …
Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and …
K S. Bhole, B Kale - Advances in Materials and Processing …, 2022 - Taylor & Francis
Stiction effect during post-processing of the polymer-based microelectro mechanical systems (MEMS) is a major class of failure in which two arrayed microstructures adhere …
IV Uvarov - Microelectronics Reliability, 2021 - Elsevier
Microelectromechanical systems (MEMS) switches are attractive for many applications including radio frequency and microwave systems, logic devices, acceleration sensing and …