Numerous applications have required the study of CO 2 plasmas since the 1960s, from CO 2
lasers to spacecraft heat shields. However, in recent years, intense research activities on the …

This work explains the need for plasma models, introduces arguments for choosing the type
of model that better fits the purpose of each study, and presents the basics of the most …

This paper reviews the basics of kinetic modelling in low-temperature N 2–O 2 plasmas,
including the strong coupling between electron, vibrational, chemical and surface kinetics …

The applicability of actinometry for measuring the absolute concentration of O, N and F
atoms in discharge plasma was studied. For this purpose, concentrations of these atoms …

The high degree of vibrational excitation of O 2 ground state molecules recently observed in
inductively coupled plasma discharges is investigated experimentally in more detail and …

N 2 dissociation in pure nitrogen plasma has a long history of research. It seems to be a
complex process which comprises many reactions involving various electronic and …

Relevant data on heterogeneous surface recombination of neutral oxygen atoms available
in the scientific literature are reviewed and discussed for various materials. The coefficients …

The recombination of O (3 P) atoms on the surface of a Pyrex tube containing a DC glow
discharge in pure O 2 was studied over a wide range of pressure (0.2–10 Torr) and …

Surface recombination of plasma radicals is generally considered to limit film conformality
during plasma-assisted atomic layer deposition (ALD). Here, we experimentally studied film …

Oxygen atom densities were measured in situ in a CO 2 glow discharge, at pressures
between 0.2 and 5 Torr (26.7–666.6 Pa). Two measurement techniques were compared …