Effect of high temperature annealing on cryogenic transport properties of silicon MOSFETs with a thin SiO2/HfO2 stacked dielectric

Z Li, GD Yuan, D Zhang, YM Liu, HR Long… - Semiconductor …, 2023 - iopscience.iop.org
Quantum computing is expected to break the computing power bottleneck with the help of
quantum superposition and quantum entanglement. In order to fabricate fault-tolerant …