Y Ahn, Y Jeon, S Lim, J Kim, J Kim,
H Seo - Surfaces and Interfaces, 2023 - Elsevier
This study introduces the use of plasma-enhanced atomic layer deposition (PEALD) for
growing ultrathin Zr-doped hafnium oxide (HfO 2-ZrO 2 or HZO) nanolaminates and the …