Phases in HfO2-Based Ferroelectric Thin Films and Their Integration in Low-Power Devices

P Pujar, H Cho, S Kim - ACS Applied Electronic Materials, 2023 - ACS Publications
HfO2-based ferroelectrics are applied in a large spectrum of electronic devices ranging from
ultralow-power logic to nonvolatile memory. The efficacy of these ferroelectrics is that these …

Effects of plasma power on ferroelectric properties of HfO2-ZrO2 nanolaminates produced by plasma enhanced atomic layer deposition

Y Ahn, Y Jeon, S Lim, J Kim, J Kim, H Seo - Surfaces and Interfaces, 2023 - Elsevier
This study introduces the use of plasma-enhanced atomic layer deposition (PEALD) for
growing ultrathin Zr-doped hafnium oxide (HfO 2-ZrO 2 or HZO) nanolaminates and the …

Eliminating Ferroelectric Hysteresis in All-Two-Dimensional Gate-Stack Negative-Capacitance Transistors

H Quan, D Meng, X Ma, C Qiu - ACS Applied Materials & …, 2023 - ACS Publications
Boltzmann distribution thermal tails of carriers restrain the subthreshold swing (SS) of field-
effect transistors (FETs) to be lower than 60 mV/decade at room temperature, which restrains …

Observation of stabilized negative capacitance effect in hafnium-based ferroic films

L Qiao, R Zhao, C Song, Y Zhou, Q Wang… - Materials …, 2024 - iopscience.iop.org
A negative capacitance (NC) effect has been proposed as a critical pathway to overcome
the'Boltzmann tyranny'of electrons, achieve the steep slope operation of transistors and …

Plasma-Irradiated Hafnia Ferroelectrics for High-Performance Flexible Thin Film Transistors

HY Rho, A Bala, A Sen, U Jeong, P Pujar… - Available at SSRN … - papers.ssrn.com
Integrating unconventional HfO2-based ferroelectrics in thin film transistors (TFTs) has
proven effective in enhancing performance by stabilizing negative capacitance. This is …