Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

The majority of commercial MEMS gyroscopes are operated in a mode-split condition where
the drive and sense modes are intentionally mismatched in frequency, thus prioritizing gain …

We report on a new design approach for XY symmetric resonator, emphasizing the increase
in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis …

This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in
presence of fabrication imperfections and reports a method for precision electrostatic …

Automotive MEMS gyroscopes are used for various purposes, such as rollover prevention
and dynamic stability. Although, employment of gyroscopes for automotive applications is …

The Electromechanical Amplitude Modulation (EAM) is frequently used to eliminate feed-
through signals between forcer and pick-off electrodes of resonant microstructures …

In this paper, the characterization and analysis of a silicon micromachined Quad Mass
Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs …

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the
aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring …

A piezoelectric disk gyroscope fabricated with a single-crystal lithium niobate (LN) wafer has
been developed for inertial navigation systems for localization during automated driving. LN …

This paper reports a more complete description of the design process of the Center Support
Quadruple Mass Gyroscope (CSQMG), a gyro expected to provide breakthrough …