Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …

The principles and technical aspects of the laboratory energy dispersive x-ray reflectometry
technique (EDXR) are reviewed. X-ray reflectometry enables us to retrieve information on …

In this paper we describe the procedure to sputter low acoustic impedance SiO 2 films to be
used as low acoustic impedance layer in Bragg mirrors for BAW resonators. The …

Large-pore mesoporous silica thin films have been synthesized by using poly (alkylene
oxide) triblock copolymers (Pluronic F127) with poly (propylene oxide)(PPO) as a swelling …

Quaternary ammonium functionalized mesoporous thin films were prepared by spin casting
mixtures of bis-(triethoxysilyl) ethane hexaethoxydisilethylene with a series of quaternary …

Results of systematic investigations of the elastic and structural properties of hydrogenated
amorphous carbon (aC: H) films as a function of deposition conditions are reported. A multi …

We have studied the structure of a high-porous silica thin film with pore sizes in nanometer
scale using X-ray reflectivity and small angle X-ray scattering in grazing incidence geometry …

Multilayers of an Fe (II)-polyelectrolyte-amphiphile complex (Fe-PAC) were investigated
simultaneously by energy-dispersive X-ray reflectivity and in-plane diffraction at the bending …

Using simultaneous analysis of both the grazing incidence X‐ray reflectivity (GIXR) and the
angular dependent fluorescence yield from ultrathin layer structures, the densities of thin La …

Hydrogenated amorphous carbon (aC: H) films were deposited, at room temperature, from a
CH 4/Ar plasma produced by a radio frequency (rf) glow discharge system at 13.56 MHz …