Photoluminescent Properties of Erbium-Doped Aluminum Scandium Nitride Thin Films
Scandium (Sc)-doped aluminum nitride (AlN)(Al1–x Sc x N) has attracted increasing
attention in integrated photonics due to its remarkable piezoelectric, electro-optic, and …
attention in integrated photonics due to its remarkable piezoelectric, electro-optic, and …
Design and Analysis of Guided Surface Acoustic Waves in ScAlN on Sapphire for Phononic Integrated Circuits
This study presents a comprehensive dispersion analysis and characterization of guided
surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films …
surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films …
Rayleigh Wave Suppression in Al0. 6Sc0. 4N-on-SiC Resonators
M Liffredo, S Stettler, F Peretti… - arXiv preprint arXiv …, 2024 - arxiv.org
We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-
doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa …
doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa …
ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) based on
30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near …
30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near …
SAW Resonators Based on High-Crystalline AlScN Film Grown by a Two-Step Method of MOCVD and PVD
In this paper, we employ a novel two-step approach combining metal-organic chemical
vapor deposition (MOCVD) and physical vapor deposition (PVD) techniques to grow high …
vapor deposition (MOCVD) and physical vapor deposition (PVD) techniques to grow high …
Focused Guided Surface Acoustic Waves in 30% Scandium Aluminum Nitride on Silicon Carbide
Slow-on-fast piezoelectric platforms, which describe the relationship between the phase
velocity of a piezoelectric material to its substrate, have facilitated the development of guided …
velocity of a piezoelectric material to its substrate, have facilitated the development of guided …