In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

The geometric designs of MEMS devices can profoundly impact their physical properties
and eventual performances. However, it is challenging for researchers to rationally consider …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

We demonstrate a resonant gas sensor uniformly coated with a metal-organic framework
(MOF) and excited near the second vibration mode for enhanced sensitivity. The possibility …

The dynamic performance of a micro-resonator depends on its energy loss mechanism
which is quantified by Q-factor (Quality factor). This paper presents numerical and analytical …

This paper reports on the fabrication and characterization of a Complementary Metal Oxide
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …

Acetone vapor sensing is important for environmental monitoring and non-invasive
screening of diabetes mellitus (DM). Inhaling higher than 176 parts per million (ppm) …

The design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG)
structural topology is crucial for its physical properties and performance. However, creating …

In this paper, the design of a low-k meander based MEMS shunt capacitive switch with
perforated beam meander has been presented. A closed form analytical model to calculate …

The quality factor of microelectromechanical resonators is a crucial performance metric and
has thus been the subject of numerous studies aimed at maximizing its value by minimizing …