Sputtered AlN thin films for piezoelectric MEMS devices-FBAR resonators and accelerometers
F Gerfers, PM Kohlstadt, E Ginsburg… - Solid state circuits …, 2010 - books.google.com
Over the past two decades, significant advances have been made in the field of
micromachined sensors and actuators. As microelectromechanical systems (MEMS) have …
micromachined sensors and actuators. As microelectromechanical systems (MEMS) have …
Method of fabricating multiple-frequency film bulk acoustic resonators in a single chip
LP Wang, E Ginsburg, D Diamant, Q Ma… - 2006 IEEE …, 2006 - ieeexplore.ieee.org
We report experimental results of a novel approach to integrate multiple-frequency film bulk
acoustic resonators (FBAR) in a single chip. An additional tuning layer was deposited and …
acoustic resonators (FBAR) in a single chip. An additional tuning layer was deposited and …