Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of
attention over the last two decades because of their low power consumption, easy …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

This paper reports a fully differential frequency modulated (FM) gyroscope where the
superposed clockwise (CW) and counter clockwise (CCW) modes are independently …

This paper reports the developments toward an integrated, tri-axial, frequency-modulated,
consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low …

This paper reports a rate integrating gyroscope (RIG) using independently controlled
clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The …

This study proposes a highly stable differential resonant accelerometer that is monolithically
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …

This paper presents a new design and a complete characterization of amplitude-modulation
gyroscopes based on piezoresistive nanogauges. The working principle and optimization …

This article proposes a digital control structure for a doubly decoupled gyroscope working in
the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops …

A vibrating ring gyroscope is operated in AM and FM mode to demonstrate improved long-
term stability of FM operation. Both bias and scale-factor (SF) accuracy were tested over a …