Study of Strained-SiGe Channel P-MOSFET Using Silvaco TCAD: Impact of Channel Thickness

SNFN Mohd Salleh, AF Abd Rahim… - Key Engineering …, 2023 - Trans Tech Publ
Compressively strained SiGe is an interesting channel material for sub 45 nm p-MOSFETs
because of its superior hole mobility (up to 10x over bulk Si channels) and compatibility with …

Study of Strained-SiGe Channel P-MOSFET Using Silvaco TCAD: Impact of Channel Thickness

SNFNM Salleh, AF Abd Rahim, NSM Razali… - Engineering Materials …, 2023 - torrossa.com
Compressively strained SiGe is an interesting channel material for sub 45 nm p-MOSFETs
because of its superior hole mobility (up to 10x over bulk Si channels) and compatibility with …