Precursors for direct-write nanofabrication with electrons
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …
nanolithography approach for the growth of nanostructures. In recent years, significant …
Writing 3D nanomagnets using focused electron beams
Focused electron beam induced deposition (FEBID) is a direct-write nanofabrication
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
[HTML][HTML] Living up to its potential—Direct-write nanofabrication with focused electron beams
Over its rather long history, focused electron beam induced deposition (FEBID) has mostly
been used as an auxiliary process in passivating surfaces in sample preparation for …
been used as an auxiliary process in passivating surfaces in sample preparation for …
Mechanism-based design of precursors for focused electron beam-induced deposition
WG Carden, H Lu, JA Spencer, DH Fairbrother… - MRS …, 2018 - cambridge.org
Focused electron beam-induced deposition (FEBID) is capable of producing metal-
containing nanostructures with lateral resolution on the sub-nanometer scale. Practical …
containing nanostructures with lateral resolution on the sub-nanometer scale. Practical …
Charged particle-induced surface reactions of organometallic complexes as a guide to precursor design for electron-and ion-induced deposition of nanostructures
JC Yu, MK Abdel-Rahman, DH Fairbrother… - … Applied Materials & …, 2021 - ACS Publications
Focused electron beam-induced deposition (FEBID) and focused ion beam-induced
deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged …
deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged …
Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy …
R Winkler, M Brugger-Hatzl, F Porrati, D Kuhness… - Nanomaterials, 2023 - mdpi.com
Electron-induced fragmentation of the HFeCo3 (CO) 12 precursor allows direct-write
fabrication of 3D nanostructures with metallic contents of up to> 95 at%. While microstructure …
fabrication of 3D nanostructures with metallic contents of up to> 95 at%. While microstructure …
Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment
This roadmap reviews the new, highly interdisciplinary research field studying the behavior
of condensed matter systems exposed to radiation. The Review highlights several recent …
of condensed matter systems exposed to radiation. The Review highlights several recent …
Identifying and rationalizing the differing surface reactions of low-energy electrons and ions with an organometallic precursor
RM Thorman, SJ Matsuda… - The journal of …, 2020 - ACS Publications
Surface reactions of electrons and ions with physisorbed organometallic precursors are
fundamental processes in focused electron and ion beam-induced deposition (FEBID and …
fundamental processes in focused electron and ion beam-induced deposition (FEBID and …
Electron-Induced Reactions of Ru(CO)4I2: Gas Phase, Surface, and Electron Beam-Induced Deposition
RM Thorman, PA Jensen, JC Yu… - The Journal of …, 2020 - ACS Publications
The reactions of low energy (< 100 eV) electrons with organometallic precursors underpin
the fabrication of metal-containing nanostructures using focused electron beam-induced …
the fabrication of metal-containing nanostructures using focused electron beam-induced …
Electron Induced Surface Reactions of HFeCo3(CO)12, a Bimetallic Precursor for Focused Electron Beam Induced Deposition (FEBID)
The use of bimetallic precursors in focused electron beam induced deposition (FEBID)
allows mixed metal nanostructures with well-defined metal ratios to be generated in a single …
allows mixed metal nanostructures with well-defined metal ratios to be generated in a single …