[HTML][HTML] Stoichiometry modulation of molybdenum oxide thin films by direct sputtering for energy applications

S La Manna, G Franzò, A Terrasi, GG Condorelli… - Surface and Coatings …, 2025 - Elsevier
Stoichiometry of molybdenum oxide, MoO x, thin films was controlled by simply modulating
the argon working pressure during the non-reactive sputtering deposition. Rutherford …