Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level

J Iannacci - Displays, 2015 - Elsevier
Abstract Reliability of MEMS (MicroElectroMechanical-Systems) devices is a crucial aspect
as it can discriminate the successful from partially or totally missed reaching of Microsystem …

[HTML][HTML] RF-MEMS for high-performance and widely reconfigurable passive components–A review with focus on future telecommunications, Internet of Things (IoT) …

J Iannacci - Journal of King Saud University-Science, 2017 - Elsevier
Since its first discussions in literature during late '90s, RF-MEMS technology (ie Radio
Frequency MicroElectroMechanical-Systems) has been showing uncommon potential in the …

A review of micro-contact physics, materials, and failure mechanisms in direct-contact RF MEMS switches

A Basu, GG Adams, NE McGruer - Journal of Micromechanics …, 2016 - iopscience.iop.org
Direct contact, ohmic MEMS switches for RF applications have several advantages over
other conventional switching devices. Advantages include lower insertion loss, higher …

RF-MEMS technology for future mobile and high-frequency applications: reconfigurable 8-bit power attenuator tested up to 110 GHz

J Iannacci, M Huhn, C Tschoban… - IEEE Electron Device …, 2016 - ieeexplore.ieee.org
In this letter, we present and test-to the best of our knowledge, for the first time-, an 8-bit (256-
state) reconfigurable RF-MEMS attenuator, from 10 MHz up to 110 GHz, realized in the CMM …

[HTML][HTML] Exploitation of response surface method for the optimization of RF-MEMS reconfigurable devices in view of future beyond-5G, 6G and super-IoT applications

J Iannacci, G Tagliapietra, A Bucciarelli - Scientific Reports, 2022 - nature.com
The emerging paradigms of the Beyond-5G, 6G and Super-IoT will demand for high-
performance Radio Frequency (RF) passive components, and RF-MEMS technology, ie …

System-on-chip considerations for heterogeneous integration of CMOS and fluidic bio-interfaces

T Datta-Chaudhuri, E Smela… - IEEE transactions on …, 2016 - ieeexplore.ieee.org
CMOS chips are increasingly used for direct sensing and interfacing with fluidic and
biological systems. While many biosensing systems have successfully combined CMOS …

Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

J Iannacci, E Serra, R Di Criscienzo, G Sordo… - Microsystem …, 2014 - Springer
In this work we discuss a novel design concept of energy harvester (EH), based on
Microsystem (MEMS) technology, meant to convert mechanical energy, available in the form …

Neural based lumped element model of capacitive RF MEMS switches

T Ćirić, R Dhuri, Z Marinković, O Pronić-Rančić… - Frequenz, 2018 - degruyter.com
In this paper a lumped element model of RF MEMS capacitive switches which is scalable
with the lateral dimensions of the bridge is proposed. The dependence of the elements of …

Modeling rf mems devices

K Van Caekenberghe - IEEE Microwave Magazine, 2012 - ieeexplore.ieee.org
The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …

RF-MEMS for 5G applications: a reconfigurable 8-bit power attenuator working up to 110 GHz. Part 1: design concept, technology and working principles

J Iannacci - Microsystem technologies, 2020 - Springer
RF-MEMS technology is indicated as a key enabling solution to realise the high-
performance and highly-reconfigurable passive components that future 5G communication …