A review of eigenmode and frequency control in piezoelectric MEMS resonators
Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …
properties, such as strong electromechanical coupling, high, and polarized linear …
4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation
Inertial navigation on a chip has long been constrained by the noise and stability issues of
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes
M Vujadinović, T Hiller, T Balslink… - Journal of …, 2024 - ieeexplore.ieee.org
This paper presents a general instability model of mode-split MEMS gyroscopes. The
proposed model can accurately predict the bias instability of a given device based on the …
proposed model can accurately predict the bias instability of a given device based on the …
A low-voltage wideband AlN-on-Si gyroscope with sub 10-DPH bias instability mode matched using laser trimming
This paper reports on the characterization of a high frequency (3MHz) aluminum nitride
(AlN) on silicon resonant gyroscope mode-matched using laser trimming and operated …
(AlN) on silicon resonant gyroscope mode-matched using laser trimming and operated …
Scale factor instability noise in mode-split open-loop MEMS gyroscopes
This paper presents analyses of scale factor instability noise (SIS) in mode-split, open-loop
MEMS gyroscopes. As the name indicates, scale factor instability noise is a stochastic …
MEMS gyroscopes. As the name indicates, scale factor instability noise is a stochastic …
Research on Frequency Splitting Analysis and Tuning Methods of Six-Antinode Cylindrical Resonator Gyroscope
Y Shi, Y Chen, Q Cai, T Zhang, C Shen… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
During the manufacturing process of the cylindrical resonator gyroscope (CRG), there are
inevitably various defects, among which frequency splitting will cause the mode shape …
inevitably various defects, among which frequency splitting will cause the mode shape …
[PDF][PDF] A high-Q solid disk BAW gyroscope in monocrystalline 4H silicon-carbide with sub-PPM as-born frequency split
This paper demonstrates, for the first time, a solid disk capacitive bulk-acoustic wave (BAW)
gyroscope in monocrystalline 4H-SiC, with a promising angle random walk of 0.03/√ h …
gyroscope in monocrystalline 4H-SiC, with a promising angle random walk of 0.03/√ h …
Strong Robustness Quad Mass Gyroscope With the Parallel Coupled Structure Design
G Chen, Z Zhan, X Wang, Z Zhou… - Journal of …, 2024 - ieeexplore.ieee.org
This paper reports a strong robustness MEMS QMG with the parallel coupled structure
design, for the first time. The motions of the four masses of the gyroscope in the drive and …
design, for the first time. The motions of the four masses of the gyroscope in the drive and …
4H Silicon Carbide Bulk Acoustic Wave MEMS Gyroscope with Ultra-High Q for On-Chip Inertial Navigation
Inertial navigation on a chip has been an unfulfilled dream limited by the noise and stability
of micromechanical Coriolis gyroscopes. While silicon has been the mainstream material for …
of micromechanical Coriolis gyroscopes. While silicon has been the mainstream material for …
Acoustically Isolated MEMS Baw Gyroscopes
DE Serrano, A Rahafrooz, D Younkin… - 2023 IEEE 36th …, 2023 - ieeexplore.ieee.org
This work reports on a new acoustically isolated MEMS bulk-acoustic wave (BAW)
gyroscope, which provides an average improvement in zero-rate offset (ZRO) variation of …
gyroscope, which provides an average improvement in zero-rate offset (ZRO) variation of …