Wide bandgap oxide semiconductors: from materials physics to optoelectronic devices

J Shi, J Zhang, L Yang, M Qu, DC Qi… - Advanced …, 2021 - Wiley Online Library
Wide bandgap oxide semiconductors constitute a unique class of materials that combine
properties of electrical conductivity and optical transparency. They are being widely used as …

Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook

HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …

Mobility–stability trade-off in oxide thin-film transistors

YS Shiah, K Sim, Y Shi, K Abe, S Ueda, M Sasase… - Nature …, 2021 - nature.com
Thin-film transistors based on amorphous oxide semiconductors could be used to create low-
cost backplane technology for large flat-panel displays. However, a trade-off between …

Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD

J Sheng, TH Hong, HM Lee, KR Kim… - … applied materials & …, 2019 - ACS Publications
Amorphous InGaZnO x (a-IGZO) thin-film transistors (TFTs) are currently used in flat-panel
displays due to their beneficial properties. However, the mobility of∼ 10 cm2/(V s) for the a …

Thermally activated defect engineering for highly stable and uniform ALD-amorphous IGZO TFTs with high-temperature compatibility

DG Kim, WB Lee, S Lee, J Koh, B Kuh… - ACS Applied Materials …, 2023 - ACS Publications
Highly stable IGZO thin-film transistors derived from atomic layer deposition are crucial for
the semiconductor industry. However, unavoidable defect generation during high …

High-performance thin-film transistor with atomic layer deposition (ALD)-derived indium–gallium oxide channel for back-end-of-line compatible transistor applications …

JS Hur, MJ Kim, SH Yoon, H Choi… - … Applied Materials & …, 2022 - ACS Publications
In this paper, the feasibility of an indium–gallium oxide (In2 (1-x) Ga2 x O y) film through
combinatorial atomic layer deposition (ALD) as an alternative channel material for back-end …

High-performance tin oxide thin-film transistors realized by codoping and their application in logic circuits

T Zhang, YF Wei, CS Zhang, G He, TJ Li… - ACS Applied Materials …, 2024 - ACS Publications
Tin oxide is a promising channel material, offering the advantages of being low-cost and
environmentally friendly and having a wide band gap. However, despite the high electron …

Remarkable Stability Improvement with a High‐Performance PEALD‐IZO/IGZO Top‐Gate Thin‐Film Transistor via Modulating Dual‐Channel Effects

YS Kim, WB Lee, HJ Oh, TH Hong… - Advanced Materials …, 2022 - Wiley Online Library
Plasma‐enhanced atomic layer deposition (PEALD)‐based bilayer IZO (back channel)/IGZO
top‐gate thin‐film transistors (TFTs) with different IZO and IGZO layer thicknesses are …

Enhancing radiation-resistance of amorphous indium–zinc-oxide thin-film transistors by group IV transition element doping

Y Kim, MG Kim, C Kim - Journal of Materials Chemistry C, 2023 - pubs.rsc.org
The effect of doping with three different group IV metal cations, specifically Ti4+, Zr4+, and
Hf4+, on the stability of amorphous indium–zinc-oxide (InZnO) thin-film transistors (TFTs) …

The effect of charge transfer transition on the photostability of lanthanide-doped indium oxide thin-film transistors

P He, H Xu, L Lan, C Deng, Y Wu, Y Lin… - Communications …, 2021 - nature.com
Amorphous oxide semiconductors are promising for their use in thin-film transistor (TFT)
devices due to their high carrier mobility and large-area uniformity. However, their …