Recent advances in micro-and bio-electromechanical system architectures for energy efficient chemiresistors

B Sharma, M Kumar, A Sharma - Microelectronic Engineering, 2024 - Elsevier
The recent evolution of microelectromechanical systems (MEMSs) presents a more mature
technology that expands from pure research towards multidisciplinary …

NiO nanoparticles-based gas sensors: A novel pulse-driven approach for enhanced and efficient hydrogen detection

W Yan, W Luo, M Li - International Journal of Hydrogen Energy, 2024 - Elsevier
In recent decades, enhancing response in metal oxide semiconductor-based gas sensors
has emerged as a crucial parameter for practical applications. In this study, we present an …

Intelligent MEMS Sensor Based on an Oxidized Medium-Entropy Alloy (FeCoNi) for H2 and CO Recognition

W Yan, Y Liu, Y Bai, Y Chen, H Zhou… - ACS Applied Materials …, 2024 - ACS Publications
In this paper, we present the design and evaluation of an intelligent MEMS sensor
employing the oxidized medium-entropy alloy (O-MEA) of FeCoNi as the gas-sensing …

MEMS Gas Sensors Based on In2O3-Decorated SnO2 Nanosheets for Aniline Detection

W Luo, J Li, M Li - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
Aniline monitoring holds significant importance across various industries. In this study, we
propose a microelectromechanical systems (MEMS) gas sensor employing In2O3-decorated …

Laser-reduced graphene oxide for a flexible liquid sliding sensing surface

XC Han, Q Wang, ZD Chen, H Zhou, Q Cai, DD Han - Optics Letters, 2023 - opg.optica.org
Flexible electronic skin is a flexible sensor system that imitates human skin. Recently,
flexible sensors have been successfully developed. However, the droplet sliding sensing …

Highly Selective MEMS Gas Sensor to Detect H2 and NH3 with Tunable Discrimination

W Yan, W Luo, J Li, M Li - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
The emerging advancements in gas sensing technology present an ongoing challenge in
achieving the selective detection of hydrogen (and ammonia (NH gases while allowing for …

Electrostatic vibration energy harvester with a self-rechargeable electret

M Li, A Luo, W Luo, X Liu… - IEEE Electron Device …, 2023 - ieeexplore.ieee.org
The electrostatic vibration energy harvester (e-VEH) typically comprises a variable capacitor,
whereas the electret layer provides a bias voltage during vibration. However, the charge …

A method of ultra-low power consumption implementation for MEMS gas sensors

Y Bing, F Zhang, J Han, T Zhou, H Mei, T Zhang - Chemosensors, 2023 - mdpi.com
In recent years, there has been a growing need for the development of low-power gas
sensors. This paper proposes pulse heating and a corresponding measurement strategy …

Low concentration CO gas sensor based on pulsed-heating and wafer-level fabricated MEMS hotplate

M Li, W Luo, W Yan - IEEE Electron Device Letters, 2024 - ieeexplore.ieee.org
In recent years, there has been extensive attention focused on enhancing the response of
metal oxide semiconductor-based gas sensors. Herein, we propose a simple pulsed-heating …

Pulse heating combined with machine learning for enhanced gas identification and concentration detection with MOS gas sensors

Y Zhuang, X Liu, X Wang, G Niu, R Cheng… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
This letter investigates the utilization of pulse heating and machine learning techniques to
overcome the limitations associated with traditional testing methods for metal oxide …