Ultralow-dielectric-constant optical thin films built from magnesium oxyfluoride vesicle-like hollow nanoparticles

D Grosso, C Boissière, C Sanchez - Nature materials, 2007 - nature.com
Academic and industrial research groups are currently working to obtain high-quality
transparent ultralow-refractive-index and ultralow-dielectric-constant thin films, as they are …

Scalable superhydrophobic coatings based on fluorinated diatomaceous earth: Abrasion resistance versus particle geometry

G Polizos, K Winter, MJ Lance, HM Meyer… - Applied Surface …, 2014 - Elsevier
Bio-inspired superhydrophobic surfaces were fabricated based on fossilized silica fresh
water diatomaceous earth (DE) particles. These nanostructured silicified diatom frustules of …

Evaluation of glycine adsorption on diamond like carbon (DLC) and fluorinated DLC deposited by plasma-enhanced chemical vapour deposition (PECVD)

MH Ahmed, JA Byrne, J McLaughlin - Surface and Coatings Technology, 2012 - Elsevier
To gain a better understanding of protein adsorption onto biomaterial surfaces is required for
the control of biocompatibility and bioactivity. Various samples of (DLC) and fluorine-doped …

Dark current improvement due to dry-etch process in InAs/GaSb type-II superlattice LWIR photodetector with nBn structure

HJ Lee, HC Jung, A Jang, JG Kim, SY Ko… - Infrared Physics & …, 2018 - Elsevier
The dark current of long wavelength infrared (LWIR) detector should be reduced to improve
performance and decrease the system size, weight and power consumption (SWaP). In this …

Effective Stabilization of Organic Cathodes Through Formation of a Protective Solid Electrolyte Interface Layer via Reduction

Y Wang, Z Huang, X Gao, R Fazaeli, Y Li - ChemSusChem, 2024 - Wiley Online Library
Organic electrode materials offer a promising alternative for lithium‐ion batteries due to their
lower costs, reduced environmental impact, renewability, and high theoretical capacity …

Soft skin layers for reconfigurable and programmable nanowrinkles

D Rhee, S Deng, TW Odom - Nanoscale, 2020 - pubs.rsc.org
Wrinkling skin layers on pre-strained polymer sheets has drawn significant interest as a
method to create reconfigurable surface patterns. Compared to widely studied metal or silica …

Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residues

QT Le, JF De Marneffe, T Conard… - Journal of The …, 2011 - iopscience.iop.org
Fluorocarbon polymer deposited on a checkerboard wafer composed of low-k dielectrics
and TiN dies (2× 2 cm squares) was used as a model polymer for wet removal experiments …

Percolation of thermal conductivity in amorphous fluorocarbons

MG Ghossoub, JH Lee, OT Baris, DG Cahill… - Physical Review B …, 2010 - APS
We report experimental evidence of the percolation of thermal conductivity in nanometer
scale thin films of amorphous fluorocarbon, using time-domain thermoreflectance …

Plasma induced damage reduction of ultra low-k dielectric by using source pulsed plasma etching for next BEOL interconnect manufacturing

JK Jang, HW Tak, YJ Shin, D San Kim… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
In order to reduce the interconnect resistance and capacitance (RC) time delay of a
semiconductor integrated circuit, a more porous dielectric material is used in recent …

Deep etching of Zerodur glass ceramics in a fluorine-based plasma

C Weigel, M Schulze, H Gargouri… - Microelectronic …, 2018 - Elsevier
The etching of glass is still much more challenging than the deep etching of silicon. But in
contrast to pure silica, most glasses are complex alloys of serval oxides including aluminium …