Synthesis, Characterization, and Single-Crystal X-ray Structures of Refractory Metal Compounds as Precursors for the Single-Source Chemical Vapor Deposition of …
The chemical vapor deposition of refractory metal nitrides requires volatile precursors and
has previously been achieved by using metal complexes containing a variety of imide …
has previously been achieved by using metal complexes containing a variety of imide …
Put a Ring on It: Improving the Thermal Stability of Molybdenum Imides through Ligand Rigidification
MA Land, KG Lawford, LK Watanabe, M Atherton… - …, 2024 - ACS Publications
Volatile bis (tert-butylimido)-dichloromolybdenum (VI) compounds containing N, N'-chelating
ligands,(tBuN) 2MoCl2· L, have previously been used as single-source precursors for the …
ligands,(tBuN) 2MoCl2· L, have previously been used as single-source precursors for the …
Microstructure and performances of MoN/CrMoN bi-layer coatings
CF Yang, CC Hu, CT Chang, CC Hsu, KY Lin… - Journal of the Australian …, 2024 - Springer
This study utilized direct current (DC) magnetron sputtering to produce a MoN/CrMoN bi-
layer film. The impact of the MoN buffer layer thickness, varying Mo DC power, and substrate …
layer film. The impact of the MoN buffer layer thickness, varying Mo DC power, and substrate …