Sputtering physical vapour deposition (PVD) coatings: A critical review on process improvement and market trend demands

A Baptista, F Silva, J Porteiro, J Míguez, G Pinto - Coatings, 2018 - mdpi.com
Physical vapour deposition (PVD) is a well-known technology that is widely used for the
deposition of thin films regarding many demands, namely tribological behaviour …

Physical vapor deposition technology for coated cutting tools: A review

Y Deng, W Chen, B Li, C Wang, T Kuang, Y Li - Ceramics International, 2020 - Elsevier
Due to various difficult-to-machine materials and increasingly severe machining conditions,
more and more attention has been paid to the physical vapor deposition (PVD) technology …

Physics and technology of magnetron sputtering discharges

JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …

Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

IL Velicu, GT Ianoş, C Porosnicu, I Mihăilă… - Surface and Coatings …, 2019 - Elsevier
Abstract Bipolar Pulse High Power Impulse Magnetron Sputtering (BP-HiPIMS) was
investigated and used in this work to control the ion bombardment process of growing thin …

Overcoming the insulating materials limitation in HiPIMS: Ion-assisted deposition of DLC coatings using bipolar HiPIMS

V Tiron, EL Ursu, D Cristea, D Munteanu, G Bulai… - Applied Surface …, 2019 - Elsevier
The present study aims to demonstrate that operating the HiPIMS discharge in bipolar
regime (BP-HiPIMS) enables an energy-enhanced deposition process of high-quality …

Optimizing the deposition rate and ionized flux fraction by tuning the pulse length in high power impulse magnetron sputtering

M Rudolph, N Brenning, MA Raadu… - Plasma Sources …, 2020 - iopscience.iop.org
High power impulse magnetron sputtering (HiPIMS) is an ionized physical vapour
deposition technique. While HiPIMS provides a high flux of metal ions to the substrate, the …

[HTML][HTML] Industrial application potential of high power impulse magnetron sputtering for wear and corrosion protection coatings

J Vetter, T Shimizu, D Kurapov, T Sasaki… - Journal of Applied …, 2023 - pubs.aip.org
PVD technologies, including vacuum arc evaporation and DC-magnetron sputtering, have
been utilized in industrial settings since the early 1980s for depositing protective coatings …

Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction

J Fischer, M Renner, JT Gudmundsson… - Plasma Sources …, 2023 - iopscience.iop.org
The influence of pulse length, working gas pressure, and peak discharge current density on
the deposition rate and ionised flux fraction in high power impulse magnetron sputtering …

Experimental verification of deposition rate increase, with maintained high ionized flux fraction, by shortening the HiPIMS pulse

T Shimizu, M Zanáška, RP Villoan… - Plasma Sources …, 2021 - iopscience.iop.org
High power impulse magnetron sputtering (HiPIMS) is an ionized physical vapor deposition
technique, providing a high flux of metal ions to the substrate. However, one of the …

[HTML][HTML] Influence of HiPIMS pulse widths on the deposition behaviour and properties of CuAgZr compositionally graded films

L Lapeyre, K Wieczerzak, C Hain, J Metzger… - Surface and Coatings …, 2022 - Elsevier
In this work, the influence of different pulse widths (25, 50 and 100 μs) during high power
impulse magnetron sputtering (HiPIMS) of copper, silver and zirconium was investigated in …