Processing at the atomic scale is becoming increasingly critical for state-of-the-art electronic
devices for computing and data storage, but also for emerging technologies such as related …

The growing need for increasingly miniaturized devices has placed high importance and
demands on nanofabrication technologies with high-quality, low temperatures, and low-cost …

Transition metal nitrides (TMNs) are reported as protective coatings in reactive hydrogen
environments. Although the permeation of H2 through TMN coatings is well reported, their …

High-quality ultrathin films of niobium nitride (NbN) are developed by the plasma-enhanced
atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon …

Millimeter-wave superconducting devices offer a platform for quantum experiments at
temperatures above 1 K, and new avenues for studying light-matter interactions in the strong …

Superconducting radiofrequency (SRF) cavities for accelerators is the only superconductivity
application that operates in the Meissner state. For decades, bulk niobium, which exhibits …

Superconducting niobium nitride thin films are used for a variety of photon detectors,
quantum devices, and superconducting electronics. Most of these applications require …

The growth of tungsten oxide (WO 3) thin films by atomic layer deposition (ALD) offers
numerous merits including atomic-scale thickness control at low deposition temperatures. In …

Superconducting microwave amplifiers are essential for sensitive signal readout in
superconducting quantum processors. Typically based on Josephson junctions, these …

Oxygen is often detected as impurity in metal and metal nitride films prepared by atomic
layer deposition (ALD) and its presence has profound and adverse effects on the material …