Focused electron beam induced deposition meets materials science

M Huth, F Porrati, OV Dobrovolskiy - Microelectronic Engineering, 2018 - Elsevier
Focused electron beam induced deposition (FEBID) is a direct-write method for the
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …

Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)

JM De Teresa, A Fernández-Pacheco… - Journal of Physics D …, 2016 - iopscience.iop.org
We review the current status of the use of focused electron beam induced deposition
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …

[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …

I Utke, P Swiderek, K Höflich, K Madajska… - Coordination Chemistry …, 2022 - Elsevier
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …

Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition

L Serrano-Ramón, R Córdoba, LA Rodríguez… - Acs Nano, 2011 - ACS Publications
We have successfully grown ultrasmall cobalt nanostructures (lateral size below 30 nm) by
optimization of the growth conditions using focused electron-beam-induced deposition …

Crystalline niobium carbide superconducting nanowires prepared by focused ion beam direct writing

F Porrati, S Barth, R Sachser, OV Dobrovolskiy… - ACS …, 2019 - ACS Publications
Superconducting planar nanostructures are widely used in applications, eg, for highly
sensitive magnetometers and in basic research, eg, to study finite size effects or vortex …

[HTML][HTML] Living up to its potential—Direct-write nanofabrication with focused electron beams

M Huth, F Porrati, S Barth - Journal of Applied Physics, 2021 - pubs.aip.org
Over its rather long history, focused electron beam induced deposition (FEBID) has mostly
been used as an auxiliary process in passivating surfaces in sample preparation for …

Superconducting materials and devices grown by focused ion and electron beam induced deposition

P Orús, F Sigloch, S Sangiao, JM De Teresa - Nanomaterials, 2022 - mdpi.com
Since its discovery in 1911, superconductivity has represented an equally inciting and
fascinating field of study in several areas of physics and materials science, ranging from its …

Three-dimensional core–shell ferromagnetic nanowires grown by focused electron beam induced deposition

J Pablo-Navarro, C Magén, JM De Teresa - Nanotechnology, 2016 - iopscience.iop.org
Functional nanostructured materials often rely on the combination of more than one material
to confer the desired functionality or an enhanced performance of the device. Here we report …

Present and future applications of magnetic nanostructures grown by FEBID

JM De Teresa, A Fernández-Pacheco - Applied Physics A, 2014 - Springer
Currently, magnetic nanostructures are routinely grown by focused electron beam induced
deposition (FEBID). In the present article, we review the milestones produced in the topic in …

Direct-write of tungsten-carbide nanoSQUIDs based on focused ion beam induced deposition

F Sigloch, S Sangiao, P Orús, JM de Teresa - Nanoscale Advances, 2022 - pubs.rsc.org
NanoSQUIDs are quantum sensors that excel in detecting a small change in magnetic flux
with high sensitivity and high spatial resolution. Here, we employ resist-free direct-write Ga+ …