Electrical and optical doping of silicon by pulsed-laser melting

SQ Lim, JS Williams - Micro, 2021 - mdpi.com
Over four decades ago, pulsed-laser melting, or pulsed-laser annealing as it was termed at
that time, was the subject of intense study as a potential advance in silicon device …

[图书][B] Laser annealing of semiconductors

J Poate - 2012 - books.google.com
Laser Annealing of Semiconductors deals with the materials science of surfaces that have
been subjected to ultrafast heating by intense laser or electron beams. This book is …

Transient annealing of semiconductors by laser, electron beam and radiant heating techniques

AG Cullis - Reports on Progress in Physics, 1985 - iopscience.iop.org
The annealing of semiconductors is of critical importance for successful electronic device
fabrication. The present review surveys the new field of transient annealing and covers all …

Donor-driven spin relaxation in multivalley semiconductors

Y Song, O Chalaev, H Dery - Physical review letters, 2014 - APS
The observed dependence of spin relaxation on the identity of the donor atom in n-type
silicon has remained without explanation for decades and poses a long-standing open …

Explosive crystallization of amorphous germanium

HJ Leamy, WL Brown, GK Celler, G Foti… - Applied Physics …, 1981 - pubs.aip.org
Explosive, or self-sustaining crystallization of amorphous thin films has been quite frequently
observed during the last century, I-16 and has recently been studied anew in connection …

Si bridging epitaxy from Si windows onto SiO2 by Q-switched ruby laser pulse annealing

M Tamura, H Tamura, T Tokuyama - Japanese journal of applied …, 1980 - iopscience.iop.org
Single crystal Si films have been epitaxially grown from chemical vapor-deposited poly-Si
films from 2000 to 6000 Å thick on (100) Si substrates by Q-switched ruby laser pulse …

Response of machining-damaged single-crystalline silicon wafers to nanosecond pulsed laser irradiation

J Yan, T Asami, T Kuriyagawa - Semiconductor Science and …, 2007 - iopscience.iop.org
Ultraprecision diamond-machined silicon wafers have been irradiated by a nanosecond
pulsed Nd: YAG laser. The results indicate that at specific laser energy intensity levels, the …

[图书][B] Springer series in materials science

C Jagadish, ARM Osgood, J Parisi, ZM Wang - 2010 - Springer
Springer series in materials science Page 2 Springer Series in Materials Science Volume 91
Series Editors Robert Hull, Charlottesville, VA, USA Chennupati Jagadish, Canberra, ACT …

Laser‐induced recrystallization and damage in GaAs

R Tsu, JE Baglin, GJ Lasher, JC Tsang - Applied Physics Letters, 1979 - pubs.aip.org
We have investigated the recrystallization of ion-implanted amorphous GaAs using a
frequency-doubled 1O-8-s pulsed Nd: YAG laser. The best results were obtained by spatially …

Electron beam induced explosive crystallization of unsupported amorphous germanium thin films

RK Sharma, SK Bansal, R Nath, RM Mehra… - Journal of applied …, 1984 - pubs.aip.org
Explosive crystallization has been observed in thin, unsupported (free) films of amorphous
germanium irradiated with a focussed, moderately intense electron beam. Transmission …