Novel Estimation Method for Dielectric Loss Quality Factor in Composite SOI/PZT Devices

[PDF] arxiv.org

Synchronized Opto-Electro-Mechanical Measurements for Energy Loss Estimation in Thin-Film-Piezoelectric-on-Substrate MEMS/NEMS Devices

V Kumar, S Tiwari, G Pillai, R Pratap… - arXiv preprint arXiv …, 2024 - arxiv.org
Piezoelectric micro-electro-mechanical systems have significant market potential owing to
their superior capabilities of transduction to those of standard capacitive and piezoresistive …
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