[HTML][HTML] Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS

J Thörnberg, J Palisaitis, N Hellgren… - Surface and Coatings …, 2020 - Elsevier
TiB x thin films with a B content of 1.43≤ x≤ 2.70 were synthesized using high-power
impulse magnetron sputtering (HiPIMS) and direct-current magnetron sputtering (DCMS) …

[图书][B] Plasma and spot phenomena in electrical arcs

I Beilis - 2020 - books.google.com
This book is devoted to a thorough investigation of the physics and applications of the
vacuum arc–a highly-ionized metallic plasma source used in a number of applications–with …

Particle simulation on the ion acceleration in vacuum arc discharge

M Song, Q Zhou, W Yang, Q Sun, Y Dong… - Plasma Sources …, 2023 - iopscience.iop.org
The supersonic ion jet generated in vacuum arc plasma has numerous applications, but the
ion acceleration mechanism is incompletely understood. In this paper, a one-dimensional …

High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature

N Hellgren, J Thörnberg, I Zhirkov, MA Sortica, I Petrov… - Vacuum, 2019 - Elsevier
Titanium boride, TiB x, thin films are grown in pure Ar discharges by high-power impulse
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …

Overview spectra and axial distribution of spectral line intensities in a high-current vacuum arc with CuCr electrodes

M Lisnyak, AV Pipa, S Gorchakov, S Iseni… - Journal of Applied …, 2015 - pubs.aip.org
Spectroscopic investigations of free-burning vacuum arcs in diffuse mode with CuCr
electrodes are presented. The experimental conditions of the investigated arc correspond to …

Plasma parameters of the cathode spot explosive electron emission cell obtained from the model of liquid-metal jet tearing and electrical explosion

MM Tsventoukh - Physics of plasmas, 2018 - pubs.aip.org
A model has been developed for the explosive electron emission cell pulse of a vacuum
discharge cathode spot that describes the ignition and extinction of the explosive pulse. The …

A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X= W, C, Al, and Si)

I Zhirkov, P Polcik, A Petruhins, S Kolozsvári… - Journal of Applied …, 2023 - pubs.aip.org
This investigation reports the influence of Ti–C and Ti–W cathode composition on an
industrial-scale dc vacuum arc plasma source. Further, we analyze the influence of plasma …

Spontaneous plasma formation via electrical explosion of nanostructured metal surface layers in plasma–surface interactions

MM Tsventoukh - Physics of Plasmas, 2023 - pubs.aip.org
The article is aimed at studying the issue of spontaneous, ie, triggerless ignition of arcing
plasma splashes due to explosive-electronemission pulses at fiber-form nanostructured (W …

[HTML][HTML] Determination of effective Ga/N ratio to control GaN growth behavior in liquid-target reactive magnetron sputter epitaxy

YL Lo, A Prabaswara, JC Chang, S Bairagi… - Materials Science in …, 2024 - Elsevier
The optimization of magnetron sputter epitaxy (MSE) for the high-volume production of high-
quality GaN films is increasingly important. This study concerns the influence of key MSE …

Two-dimensional particle simulation on the behavior of multi-charged copper ions in the cathode spot of a pulsed vacuum arc discharge

W Yang, Q Zhou, Q Sun, Z Dong - Journal of Applied Physics, 2019 - pubs.aip.org
The behavior of multicharged ions in the cathode spot of pulsed copper vacuum arc is
studied by the 2D3V electrostatic Particle-In-Cell Direct Simulation Monte Carlo method …