The development of molecular electronic switching devices for memory and computing
applications presents one of the most exciting contemporary challenges in nanoscience and …

Gate layouts of spin-qubit devices are commonly adapted from previous successful devices.
As qubit numbers and device complexity increase, modeling new device layouts and …

This paper reviews recent experimental approaches to the development of surface
nanostructures from nanoparticles. The formation of nanowires by electron beam writing in …

In this paper a technology for dry etching of quartz for the fabrication of Phase Shift Masks
(PSMs) and micromechanic applications is presented. Reactive Ion Etching (RIE) with …

This paper reports on the development of a technology which will offer the potential to
manufacture micro-engines, micro-turbines, micro-sensors, micro-actuators and electronic …

Recent developments of lithographic techniques as well as improved chemical synthesis
methods allow researchers to engineer novel nanostructured materials consisting of arrays …

The term “microfabrication” has been used to denote the technology for manufacturing
integrated micro-circuits and microsystems. During the last 30 years the advanced micro …

A process is presented to fabricate a coplanar buried metal--metal junction on the surface.
The surface is etched with reactive ion etching (RIE) through a PMMA mask where the …

The electron-beam response of new chemically amplified positive multi-component ARCH-
resist family (ARCH and ARCH2) and the suitability of pattern transfer through single layer …

The structure and magnetism of Au/Co multilayers grown on patterned substrates are
investigated. The structure and morphology are studied by means of X-ray diffraction spectra …