Selective carbon material engineering for improved MEMS and NEMS

S Neuville - Micromachines, 2019 - mdpi.com
The development of micro and nano electromechanical systems and achievement of higher
performances with increased quality and life time is confronted to searching and mastering …

Mechanical property measurement of micro/nanoscale materials for MEMS: a review

T Namazu - IEEJ Transactions on Electrical and Electronic …, 2023 - Wiley Online Library
By virtue of a great progress of semiconductor fabrication technologies, micro electro‐
mechanical systems (MEMS) have been developed for a wide variety of industries. For …

Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

MFL De Volder, SJ Park, SH Tawfick… - Journal of …, 2011 - iopscience.iop.org
Vertically aligned carbon nanotube (CNT)'forest'microstructures fabricated by chemical
vapor deposition (CVD) using patterned catalyst films typically have a low CNT density per …

Strain-engineered manufacturing of freeform carbon nanotube microstructures

M De Volder, S Park, S Tawfick, AJ Hart - Nature communications, 2014 - nature.com
The skins of many plants and animals have intricate microscale surface features that give
rise to properties such as directed water repellency and adhesion, camouflage, and …

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle Propulsion via H2O2 Decomposition

KM Marr, B Chen, EJ Mootz, J Geder, M Pruessner… - ACS …, 2015 - ACS Publications
The utility of unmanned micro underwater vehicles (MUVs) is paramount for exploring
confined spaces, but their spatial agility is often impaired when maneuvers require burst …

Multi‐instrument characterization of the surfaces and materials in microfabricated, carbon nanotube‐templated thin layer chromatography plates. An analogy to 'The …

DS Jensen, SS Kanyal, N Madaan… - Surface and …, 2013 - Wiley Online Library
We apply a suite of analytical tools to characterize materials created in the production of
microfabricated thin layer chromatography plates. Techniques used include X‐ray …

Structural biofilm resistance of carbon‐infiltrated carbon nanotube coatings

SR Morco, DL Williams, BD Jensen… - Journal of Orthopaedic …, 2022 - Wiley Online Library
Periprosthetic joint infection (PJI) is a devastating complication of orthopedic implant
surgeries, such as total knee and hip arthroplasties. Treatment requires additional surgeries …

Tailoring the mechanical properties of high‐aspect‐ratio carbon nanotube arrays using amorphous silicon carbide coatings

RH Poelma, B Morana, S Vollebregt… - Advanced Functional …, 2014 - Wiley Online Library
The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to
tailor their mechanical response by the infiltration and deposition of nanoscale conformal …

Materials made of carbon nanotubes. The carbon nanotube forest

EG Rakov - Russian Chemical Reviews, 2013 - iopscience.iop.org
Publications concerning research on unique material made of carbon nanotubes (CNTs)
aligned perpendicular to the substrate surface, namely, CNT forest, are analyzed and …

Fabrication of high aspect-ratio metallic nanotube array with highly-ordered periodicity using HiPIMS

AK Altama, JP Chu, P Yiu, A Purniawan… - Journal of Alloys and …, 2023 - Elsevier
Metal alloys are increasingly being used in the synthesis of nanostructures, such as
nanotubes. This study was an attempt to expand the applicability of metallic nanotube arrays …