In one embodiment, a ruggedized wafer level microelectro mechanical (“MEMS”) force
sensor includes a base and a cap. The MEMS force sensor includes a flexible membrane …

According to one embodiment, a strain sensing element provided on a deformable Substrate
includes: a first magnetic layer; a second magnetic layer, a spacer layer, and a bias layer …

According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A
circumscribing rectangle circumscribing a configuration of a film Surface of the film part has …

Described herein is a ruggedized microelectromechanical (“MEMS”) force sensor including
both piezoresistive and piezoelectric sensing elements and integrated with comple mentary …

Primary Examiner—Harshad R Patel Assistant Examiner—Brandi Hopkins (74) Attorney,
Agent, or Firm—Finnegan, Henderson, Farabow, Garrett & Dunner, LLP (57) ABSTRACT …

A pressure sensor according to an embodiment includes: a support member; a membrane
supported by the support and having flexibility; and a strain detection element formed on the …

According to one embodiment, a pressure sensor includes a base unit, a film unit, and a
plurality of sensing elements. The plurality of sensing elements is provided on the film unit …

According to one embodiment, a pressure sensor includes: a Support section; a film section;
and a strain sensing element. The film section is Supported by the Support section and …

According to one embodiment, a strain sensing element includes a film unit, and a sensing
unit. The film unit has a film Surface and is capable of being deformed. The sensing unit …

According to one embodiment, an acoustic sensor includes a base and a first strain sensing
element. The base includes a support and a first film unit supported by the support. The first …