2022 review of data-driven plasma science
Data-driven science and technology offer transformative tools and methods to science. This
review article highlights the latest development and progress in the interdisciplinary field of …
review article highlights the latest development and progress in the interdisciplinary field of …
Optical Adhesives and Screen Sealants for Foldable Displays: Analysis, Progress and Trends
Y Du, Y Li, C Li, R Xu, L Meng, Y Bai - ACS Applied Materials & …, 2025 - ACS Publications
The realm of flexible display devices, particularly centered around folding screen
smartphones, is undergoing rapid advancements. As integral components, optical …
smartphones, is undergoing rapid advancements. As integral components, optical …
Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O2/Ar Capacitively Coupled Plasma
In the semiconductor etch process, as the critical dimension (CD) decreases and the
difficulty of the process control increases, in-situ and real-time etch profile monitoring …
difficulty of the process control increases, in-situ and real-time etch profile monitoring …
[HTML][HTML] Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production
Meter-scale of the large area inductively coupled plasma etchers with the capacitive power
coupling are widely applied for the mass production of OLED (organic light emitting diode) …
coupling are widely applied for the mass production of OLED (organic light emitting diode) …
Plasma information-based virtual metrology (PI-VM) and mass production process control
In this paper, we review the development of plasma engineering technology that improves
dramatically the production efficiency of OLED (organic light-emitting diode) displays and …
dramatically the production efficiency of OLED (organic light-emitting diode) displays and …
Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM
Metal target dry etching process applied for the organic light emitting diode display
manufacturing is hard to control without the generation of the defect particles. A large …
manufacturing is hard to control without the generation of the defect particles. A large …
Micro-range uniformity control of the etching profile in the OLED display mass production referring to the PI-VM model
The high-value process strategy in the organic light emitting diode display manufacturing
requires strict etching profile control to obtain the normal performance of the display pixels …
requires strict etching profile control to obtain the normal performance of the display pixels …
Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
The production efficiencies of organic light emitting diode (OLED) displays and
semiconductor manufacturing have been dramatically improving with the help of plasma …
semiconductor manufacturing have been dramatically improving with the help of plasma …
Plasmas for microfabrication.
S Hamaguchi, S Agarwal, L Zajickova… - Plasma Processes …, 2019 - search.ebscohost.com
Plasma-assisted microfabrication has been a topic of capital importance in the evolution of
plasma science and technology, especially since the 1970s. To a large extent, one can …
plasma science and technology, especially since the 1970s. To a large extent, one can …
Latent Space Models of Plasmas: Virtual Metrology and Surrogate Plasma Models with Deep Generative Models
G Daly - 2023 - search.proquest.com
Semiconductors are a fundamentally important part of modern society and semiconductor
manufacturing is a key industry around the world. Plasma etching and deposition are the …
manufacturing is a key industry around the world. Plasma etching and deposition are the …