In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

In view of the large scientific and technical interest in the MEMS accelerometer sensor and
the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the …

In this paper, a novel graphene-based optical micro-electro-mechanical systems (MEMS)
accelerometer sensor is proposed, which is relied on unique properties of graphene and …

Laser interferometry is one of the most accurate measurement technologies whose
displacement resolution can reach the femtometer (fm) level. With the development of Micro …

In this paper, a novel optical microelectromechanical systems accelerometer sensor is
proposed by using a two-dimensional photonic crystal add-drop filter which is relied on a …

Sensor technology is the backbone of diverse engineering and biomedical applications that
has attracted the attention of academicians and researchers. Design and development of an …

Non-Hermitian photonics has attracted increasing attention especially for sensing
applications. Two coupled optical systems, designed to work at the “exceptional point” …

In this paper, a novel optical MEMS accelerometer is proposed based on evanescent
coupling between parallel silicon nanowaveguides. The coupling length between …

This paper proposes a novel graphene‐based optical microelectromechanical systems
MEMS accelerometer that is dependent on the intensity modulation and optical properties of …