Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Zinc Oxide Grown by Atomic Layer Deposition: From Heavily n‐Type to p‐Type Material

E Guziewicz, TA Krajewski… - … status solidi (b), 2020 - Wiley Online Library
ZnO grown by atomic layer deposition (ALD) is an interesting material for electronic
applications requiring low processing temperature. Herein, it is shown that the electrical …

ALD grown zinc oxide with controllable electrical properties

E Guziewicz, M Godlewski, L Wachnicki… - Semiconductor …, 2012 - iopscience.iop.org
The paper presents results for zinc oxide films grown at low-temperature regime by atomic
layer deposition (ALD). We discuss electrical properties of such films and show that low …

[HTML][HTML] Investigations of the structural, morphological and electrical properties of multilayer ZnO/TiO2 thin films, deposited by sol–gel technique

MI Khan, KA Bhatti, R Qindeel, LG Bousiakou… - Results in physics, 2016 - Elsevier
Investigations of the structural, morphological and electrical properties of multilayer ZnO/TiO
2 thin films deposited by sol–gel technique on glass substrate. Sol–gel is a technique in …

Structural properties of thin ZnO films deposited by ald under O-rich and Zn-rich growth conditions and their relationship with electrical parameters

S Mishra, E Przezdziecka, W Wozniak, A Adhikari… - Materials, 2021 - mdpi.com
The structural, optical, and electrical properties of ZnO are intimately intertwined. In the
present work, the structural and transport properties of 100 nm thick polycrystalline ZnO films …

Influence of Al doping on the properties of ZnO thin films grown by atomic layer deposition

Y Geng, L Guo, SS Xu, QQ Sun, SJ Ding… - The Journal of …, 2011 - ACS Publications
Aluminum-doped zinc oxide (AZO) films were grown by atomic layer deposition at 200° C.
The influence of Al content on the structure, optical, and electrical properties of AZO films …

Multicolored structural coloration of carbon nanotube fibers

R Li, S Zhang, H Chen, Y Huang, B Wang, X Wu… - …, 2023 - Wiley Online Library
Carbon nanotube fibers (CNTFs) are endowed with excellent mechanical, electrical, and
thermal properties and are considered promising candidates in numerous cutting‐edge …

A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance

S Kim, S Lee, SY Ham, DH Ko, S Shin, Z Jin… - Applied Surface …, 2019 - Elsevier
We present a kinetic model for the reaction of diethylzinc (DEZ) adsorption in atomic layer
deposition (ALD) of ZnO from DEZ and water. The proposed model has been verified by …

Predicting phonon scattering and tunable thermal conductivity of 3D pillared graphene and boron nitride heterostructure

S Karimzadeh, B Safaei, TC Jen - International Journal of Heat and Mass …, 2021 - Elsevier
In this work, we have studied the transfer of phonon energy in hybrid structure of pillared
graphene and boron nitride film. The obtained results showed that, due to the occurrence of …

Characterization of ZnO thin films grown on different p-Si substrate elaborated by solgel spin-coating method

W Chebil, A Fouzri, A Fargi, B Azeza, Z Zaaboub… - Materials Research …, 2015 - Elsevier
In this study, ZnO thin films are deposited by sol–gel technique on p-type crystalline silicon
(Si) with [100] orientation, etched silicon and porous silicon. The structural analyses showed …