Surface acoustic wave (SAW) sensors: Physics, materials, and applications

D Mandal, S Banerjee - Sensors, 2022 - mdpi.com
Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface
of a material with wave vectors orthogonal to the normal direction to the surface. Based on …

[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YQ Fu, JK Luo, NT Nguyen, AJ Walton… - Progress in Materials …, 2017 - Elsevier
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Electronically integrated, mass-manufactured, microscopic robots

MZ Miskin, AJ Cortese, K Dorsey, EP Esposito… - Nature, 2020 - nature.com
Fifty years of Moore's law scaling in microelectronics have brought remarkable opportunities
for the rapidly evolving field of microscopic robotics,,,–. Electronic, magnetic and optical …

Aluminum nitride photonic integrated circuits: from piezo-optomechanics to nonlinear optics

X Liu, AW Bruch, HX Tang - Advances in Optics and Photonics, 2023 - opg.optica.org
The commercial success of radio-frequency acoustic filters in wireless communication
systems has launched aluminum nitride (AlN) as one of the most widely used …

Ultrathin Nitride Ferroic Memory with Large ON/OFF Ratios for Analog In‐Memory Computing

D Wang, P Wang, S Mondal, M Hu, Y Wu… - Advanced …, 2023 - Wiley Online Library
Computing in the analog regime using nonlinear ferroelectric resistive memory arrays can
potentially alleviate the energy constraints and complexity/footprint challenges imposed by …

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Y Zou, C Gao, J Zhou, Y Liu, Q Xu, Y Qu… - Microsystems & …, 2022 - nature.com
Bulk acoustic wave (BAW) filters have been extensively used in consumer products for
mobile communication systems due to their high performance and standard complementary …

CMOS-integrated aluminum nitride MEMS: A review

RMR Pinto, V Gund, RA Dias… - Journal of …, 2022 - ieeexplore.ieee.org
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

AlN piezoelectric thin films for energy harvesting and acoustic devices

C Fei, X Liu, B Zhu, D Li, X Yang, Y Yang, Q Zhou - Nano Energy, 2018 - Elsevier
Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …

Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

RMR Pinto, V Gund, C Calaza, KK Nagaraja… - Microelectronic …, 2022 - Elsevier
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …