Near-ideal top-gate controllability of InGaZnO thin-film transistors by suppressing interface defects with an ultrathin atomic layer deposited gate insulator

J Li, Y Zhang, J Wang, H Yang, X Zhou… - … Applied Materials & …, 2023 - ACS Publications
An ultrathin atomic-layer-deposited (ALD) AlO x gate insulator (GI) was implemented for self-
aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Although …

As-Grown Crystalline InGaZnO by Spray Pyrolysis on a Flexible Substrate for a Thin-Film Transistor with Excellent Stability

J Bae, A Ali, MM Islam, M Jeong, C Park… - ACS Applied Materials …, 2023 - ACS Publications
The development of low-cost, high-mobility oxide thin-film transistors (TFTs) with excellent
stability is of increasing interest. The coplanar oxide TFTs can be used for high-speed, large …

High-Performance Self-Aligned Top-Gate Amorphous InGaZnO TFTs With 4 nm-Thick Atomic-Layer-Deposited AlOx Insulator

J Li, Y Zhang, J Wang, H Yang, X Zhou… - IEEE Electron …, 2022 - ieeexplore.ieee.org
Electrical characteristics of self-aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-
film transistors (TFTs) with 4 nm-thick atomic-layer-deposited (ALD) AlO x gate insulator (GI) …

Roles of Oxygen interstitial defects in atomic-layer deposited InGaZnO thin films with controlling the cationic compositions and gate-stack processes for the devices …

SH Bae, JH Yang, YH Kim, YH Kwon… - … applied materials & …, 2022 - ACS Publications
Roles of oxygen interstitial defects located in the In–Ga–Zn-O (IGZO) thin films prepared by
atomic layer deposition were investigated with controlling the cationic compositions and …

Junctionless Structure Indium–Tin Oxide Thin-Film Transistors Enabling Enhanced Mechanical and Contact Stability

SP Jeon, JW Jo, D Nam, DW Kang… - … Applied Materials & …, 2024 - ACS Publications
In recent years, considerable attention has focused on high-performance and flexible
crystalline metal oxide thin-film transistors (TFTs). However, achieving both high …

Observation of hydrogen-related defect in subgap density of states and its effects under positive bias stress in amorphous InGaZnO TFT

JT Jang, D Ko, SJ Choi, DM Kim… - IEEE Electron Device …, 2021 - ieeexplore.ieee.org
In amorphous oxide semiconductors, hydrogen-related defects have been unable to be
observed from the electrical characteristics of thin-film transistors (TFTs) in comparison to …

Device Characterization of Nanoscale Vertical-Channel Transistors Implemented with a Mesa-Shaped SiO2 Spacer and an In–Ga–Zn–O Active Channel

HJ Ryoo, HM Ahn, NJ Seong, KJ Choi… - ACS Applied …, 2021 - ACS Publications
A nanoscale vertical-channel thin film transistor (V-TFT) with a channel length shorter than
160 nm was fabricated and characterized, in which In–Ga–Zn–O (IGZO) and SiO2 thin films …

Effect of Moisture Exchange Caused by Low‐Temperature Annealing on Device Characteristics and Instability in InSnZnO Thin‐Film Transistors

Z Chen, M Zhang, S Deng, Z Jiang… - Advanced Materials …, 2022 - Wiley Online Library
Thin‐film transistors (TFTs) in practical operations are inevitably impacted by moisture and
temperature. An investigation on the joint effect of environmental moisture and working …

Analysis of drain-induced barrier lowering in InGaZnO thin-film transistors

TJ Yang, JH Kim, CII Ryoo, SJ Myoung… - … on Electron Devices, 2022 - ieeexplore.ieee.org
Characterization of short-channel amorphous indium gallium zinc oxide (InGaZnO)(a-IGZO)
thin-film transistors (TFTs) has been a crucial issue to realize higher resolution display and …

a-InGaZnO Thin-Film Transistors With Novel Atomic Layer-Deposited HfO2 Gate Insulator Using Two Types of Reactant Gases

KM Lee, BK Ju, SH Choi - IEEE Transactions on Electron …, 2022 - ieeexplore.ieee.org
Plasma-enhanced chemical vapor deposition is often utilized to fabricate amorphous indium–
gallium–zinc oxide (a-IGZO) thin-film transistors (TFTs) with mobility of approximately 7 …